Mass Flow Controllers

MicroFlo

L: 2.04″ W: 1.50″ H: 1.87″
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MediFlo

L: 2.8″ W: 1.50″ H: 5.63″
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MetaFlo

L: 5.5″ W: 1.50″ H: 2.8″
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MetaFlow Mass Flow Controller
Precision Models
Flow Range Up to 1000sccm Up to 20 SLPM Up to 20 SLPM
Linearity Error: 0.5% or 1.0% FS* 0.5% or 1.0% FS* 0.5% or 1.0% FS*
Repeatablity 0.15% FS 0.15% FS 0.15% FS
Flow Range 150ms 150ms 100ms
OEM (Economical) Models
Flow Range Up to 500sccm Up to 20 SLPM Up to 20 SLPM
Linearity Error: 3.0% FS 3.0% FS 3.0% FS
Repeatablity 0.15% FS 0.15% FS 0.15% FS

 

* Customer-Specified