MicroFlo Mass Flow Controllers

Features & Benefits

  • Flow Range: Up to 1000 sccm
  • Linearity Error: 0.5% FS
  • Repeatability: 0.15% FS
  • Response Time: 150ms

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Specifications Snapshot

** Scroll down for detailed specifications**

Analog Model Digital Model
Linearity ± 3.0% of Full Scale (Typical) ± 0.5% of Full Scale
Repeatability & Hysteresis Range Dependant ± 0.15% FS
Response Time
(to within 1% of set point)
40 msec 150 msec
Temperature Coefficient
(Deviation from 21ºC Cal Temp)
0.09% / ºC 0.09% / °C Uncompensated
0.005% / ºC Compensated
Long Term Stability
(7500 hours)
0.2%FS 0.2%FS

 

DETAILED PRODUCT SPECIFICATIONS
Performance
LinearityUp to ± 0.5% of Full Scale (Typical), Customer Specified
Repeatability & Hysteresis± 0.15% FS
Temperature Coefficient0.009% / ºC from 21ºC set point
Response Time40 msec (typical, from 2%-100 FS)
Long Term Stability0.2% FS / >7500 hours (continuous operation)
Fluid Requirements:
Calibration GasAny, Non-Corrosive, Customer Specified
Flow RangesAny, Customer Specified
Pressure Range0-100 Psi, Cal Pressure: 25 Psi
Internal Leakage10-5 @ 1, 30 and 100 Psi (He)
External Leakage2 x 10-6 sccm (He)
Electrical Requirements:
Input Voltage
(single supply)
12, 15, 18, or 24 volts +10% - 3%
Power Consumption3.0 Watts Maximum
Control & Output Voltage/Signal0-5 VDC, 1-5 VDC, 4-20mA, RS232 (Addressable)
*Profibus (Coming Soon!)
Environmental Requirements:
Operating Ambient Temp.0-50ºC
Storage Temperature-40 - 70ºC
Humidity Range5% - 95% (Relative, non-condensing)
Nominal Temperature21ºC ± 5ºC
Mechanical Configuration:
Input/Output Ports10-32 Threaded (Others Consult Factory)
DimensionsL: 2.0” W: 1.5” H: 1.85”
Weight5.4 oz
Construction (wetted materials):
ManifoldNickel Plated Aluminum
O-RingsFluorocarbon (Viton®), others at additional cost
Valve ComponentsBrass 360, AISI 300 series, 430 FR Stainless Steel
Flow SensorCeramic Flow Tube (non-out gassing), Silicon, Silicon Nitrite Gold, Aluminum Oxide Epoxy Sealant, Fluorocarbon (Viton®), Polythermide (100, 200 & 300 sccm MFC only)