MicroFloL: 2.04″ W: 1.50″ H: 1.85″ |
MediFloL: 2.8″ W: 1.50″ H: 5.50″ |
MetaFloL: 5.5″ W: 1.50″ H: 2.8″ |
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Precision Models | ||||
Flow Range | Any, Customer Specified | Any, Customer Specified | Up to 20 SLPM | |
Linearity Error: | ±0.05% FS* | ±0.5% FS* | 0.5% or 1.0% FS* | |
Repeatablity | 0.15% FS | 0.15% FS | 0.15% FS | |
Response Time | 40 msec | 40 msec | 100 msec | |
OEM (Economical) Models | ||||
Flow Range | Up to 500sccm | Up to 20 SLPM | Up to 20 SLPM | |
Linearity Error: | 3.0% FS | 3.0% FS | 3.0% FS | |
Repeatablity | 0.15% FS | 0.15% FS | 0.15% FS |
* Customer-Specified