MetaMeter Mass Flow Meter

MetaFlow Mass Flow ControllerFeatures & Benefits

  • Flow Range: Up to 20 SLPM
  • Linearity Error: 0.05% FS
  • Repeatability: 0.15% FS
  • Response Time: 100ms

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DETAILED PRODUCT SPECIFICATIONS
Performance
Linearity 0.5%, 1.0% or 3.0% FS CS*
Repeatability & Hysteresis 0.15% FS
Thermal Drift 0.1% FS / °C
Response Time 100 msec (Typical)
Fluid Requirements
Calibration Gas Any Non-Corrosive Gas CS
Flow Ranges Up to 20 SPLM CS
Pressure Range 1-150 PSID CS
Internal Leakage 1×10-5 sccm @ 1, 30 & 100 PSI
External Leakage 2 x 10-6 sccm (He)
Electrical Requirements
Input Voltage 12V, 15V, or 24V CS
Power Consumption 2.2 Watts (Max) CS
Control Signal 0-5V, 1-5V, 0-10V, 4-20mA CS
Output Signal 0-5V, 1-5V, 0-10V, 4-20mA CS
Environmental Requirements
Operating Temperature Range 0°C to 50°C
Storage Temperature -40°C to -70°C
Relative Humidity (Gas) 5 to 95% Non-Condensing
Calibration Temperature 21°C +/- 5°C
Gas Connection O-ring AS568A-006 or equivalent
Mechanical Configuration
Input/Output Ports 1/8″ NPT
Physical Dimensions L: 5.5″ W: 1.5″ H: 2.8″
Weight 13.0 oz
Construction (Wetted Materials)
Manifold Nickel Plated Aluminum
Polyester
O-Rings Flurocarbon (Viton®)
Valve Components Brass 360, AISI 300 series
430 FR Stainless Steel
Tubing Polyeurethane
Sealant Anaerobic
Flow Sensor Thermoplastic, Silicon,
Silicon Nitrite, Gold,
Aluminum Oxide, Epoxy,
Fluorocarbon (Viton®)

*CS = Customer Specified