MicroMeter Mass Flow Meter

Micro Flow Meters from PneucleusFeatures & Benefits

  • Flow Range: Up to 1000 sccm
  • Linearity Error: 0.05% FS
  • Repeatability: 0.15% FS
  • Response Time: 100 ms

Specifications

View CAD

  Digital Model
Linearity ± 0.5%
Repeatability & Hysteresis ± 0.15% FS
Response Time
(to within 1% of set point)
100 msec
Temperature Coefficient
(Deviation from 21ºC Cal Temp)
0.09% / °C Uncompensated
0.005% / ºC Compensated
Long Term Stability
(7500 hours)
0.2%FS